With the increasing level of high performance and integration of super LSI devices and other IC products in the semiconductor industry, dry-etching gases are in high demand for use in ultrafine fabrication. UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires.
- A new manufacturing method based on UBE's proprietary technology. (Patented in a number of countries, including Japan, the U.S., Canada, and the EU.)
- Extremely high-purity boron trichloride can be manufactured in a closed system that uses boric acid as a raw material.
- Quality guaranteed through advanced analysis capabilities.
- No quality irregularities thanks to integrated production that starts from raw materials.
Purity |
99.999% or better |
Impurities |
Impurities (typical analysis results in ppb)
Ag |
< 0.2 |
|
Co |
< 3.0 |
|
Mg |
< 4.0 |
|
Pb |
< 0.2 |
Al |
< 2.0 |
|
Cr |
< 0.2 |
|
Mn |
< 1.0 |
|
Sb |
< 1.0 |
Bi |
< 5.0 |
|
Cu |
< 0.5 |
|
Mo |
< 0.5 |
|
Si |
< 200 |
Ca |
< 5.0 |
|
Fe |
< 20 |
|
Na |
< 2.0 |
|
Sn |
< 10 |
Cd |
< 0.1 |
|
K |
< 4.0 |
|
Ni |
< 3.0 |
|
Zn |
< 4.0 |
|
Appearance |
Transparent, colorless liquid |
Odor |
Similar to hay |
Molecular weight |
117.2 |
Boiling point (°C) |
12.4 |
Melting point (°C) |
-107 |
Liquid density (kg/l) |
1.434(0°C) |
Uses |
Since UBE's boron trichloride is of the highest quality, it can be widely used for all manner of applications, including:
- Dry-etching gas for aluminum wires
- Gas for CVD
- Raw material for boron nitride (BN)
- Raw material for pharmaceutical and agrochemicals
- Raw material for catalysts
|
Packaging |
- Internal volume (l): 10l, 47l
- Filled weight (kg): 10kg, 50kg
|
Note of Caution on Handling |
Although this chemical is nonflammable, it produces heavy white smoke in damp air, and breaks down into boric acid and chlorine. |
Inquiry
Products Inquiry
- UBE Corporation
- Specialty Products Div.
Specialty Products Business Dept.
Functional Products Gr.
- Phone : +81(3)-5419-6186
- Fax : +81(3)-5419-6263
- Products Inquiry Form