Boron trichloride
UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires.
Semiconductor Gas Products
UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires.
This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless.
