Boron trichloride
UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires.
Semiconductor Gas Products
Product
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UBE RID
This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless.
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RID-TRAPPER
This equipment efficiently collects large quantities of solids generated in the semiconductor and liquid crystal manufacturing process. It will have a major positive impact on the manufacturing process, including reduced frequency of pipe maintenance and increased up time.
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RID-ACE
The odor that results when cleaning chambers is largely the result of toxic gases such as HCl, HF, and Cl2. It worsens the work environment and is a major obstacle to work efficiency. This unit reduces these cases to the threshold limit value (TLV) or lower, thereby improving work efficiency.
