High-purity aqueous ammonium

Outline

With the increasingly high integration and miniaturization of semiconductor devices, there has been a growing demand for even higher quality and higher purity aqueous ammonium, which is used to clean silicon wafers. UBE's high-purity aqueous ammonium is a high-grade product with virtually no metal ion particles thanks to our integrated manufacturing under stringent quality control that covers everything from raw material refining to manufacturing and packaging.

Properties

Chemical properties	A transparent, colorless solution that exhibits a reaction to strong alkalis. Has a distinct, powerful, irritating odor due to the volatilization of ammonia gas, even at room temperature, and when heated, ammonia gas volatilization increases violently. Etches copper, nickel, zinc, tin and their alloys. Reacts violently, releasing heat when exposed to acid or halogen.
Physical properties	Specific gravity    (20°C):    0.8980(28%)         0.8920(30%) Specific heat   (20°C):   1.0 cal/g-°C Viscosity   (20°C):   1.29 cp Vapor pressure   (20°C):   0.68 kg/cm2     (30°C):   1.03 kg/cm2

Characteristics

• High purity, high quality
• Low metal ion content
• Low particle content

Packaging

Special polyethylene vessels

• Drums:170kg(200l), 90kg(100l)
• Cans:18kg(20l)
• Containers:900kg(1m³)

Handling Precautions

Effect on human body	Ammonia gas has a detectable odor between 5 and 10ppm. Inhaling high concentrations of ammonia gas causes coughing, respiratory distress, vomiting, fluid in the lungs, bronchitis, and pneumonia. Contact with the eyes causes corneal clouding and tearing, and may even lead to vision impairment or loss. Irritates or corrodes skin and mucous membranes due to its strong alkalinity. May cause gastrointestinal disorders.
Body protection	Wear protective goggles, a gas mask designed specifically for ammonia gas, and other protective gear such as rubber gloves. When opening, keep face at a safe distance and slowly remove the plug so that the ammonia gas can slowly dissipate. Once the pressure has equalized, then remove the plug completely.
Emergency treatment	Rinse immediately with a large amount of running water if it comes into contact with skin. Rinse immediately with a large amount of running water if it gets in eyes and then seek treatment from an ophthalmologist. If it gets in nose or down throat, rinse nose out and gargle with 2% boric acid aqueous solution.
Others	Rinse away any leakage with a large amount of running water. Do not allow any gas leakage near ignition sources. Extinguish fires with a large amount of running water.

Storage Precautions

• Structures for storing vessels containing this chemical should have adequate natural ventilation or a ventilation system.
• Since heating causes the release of ammonia gas, avoid exposure to direct sunlight and keep containers at 40°C or less.
• Handle carefully to avoid physically damaging vessels.
• Provide a place to wash face, a safety shower, and water plumbing near the area used for storing and handling.

Regulatory Information

Poisonous and Deleterious Substances Control Law	Deleterious substances
Labor Safety and Sanitation Law	Specified chemical substances
Regulations for the Transport and Storage of Dangerous Goods in Ships	Corrosive substances

Acceptable Concentration

Acceptable Concentration	25ppm(18mg/m3)