Semiconductor Gas ProductsChemicals
UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires.
This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless.
This equipment efficiently collects large quantities of solids generated in the semiconductor and liquid crystal manufacturing process. It will have a major positive impact on the manufacturing process, including reduced frequency of pipe maintenance and increased up time.
The odor that results when cleaning chambers is largely the result of toxic gases such as HCl, HF, and Cl2. It worsens the work environment and is a major obstacle to work efficiency. This unit reduces these cases to the threshold limit value (TLV) or lower, thereby improving work efficiency.
- Synthetic Rubber
- Engineering Plastics
- Industrial Chemicals
- Liquified Gas
- Ammonium Sulfate
- Battery Materials
- Separation Membrane
- Fine Chemicals
- High Purity Chemicals
- Semiconductor Gas Products
- Continuous Inorganic Fiber
- Products for Polyurethane Resins