RID-TRAPPER

Outline

This equipment efficiently collects large quantities of solids generated in the semiconductor and liquid crystal manufacturing process. It will have a major positive impact on the manufacturing process, including reduced frequency of pipe maintenance and increased up time.

*RID-TRAPPER is a registered trademark in Japan.

Features

1. High capacity
   Supports capacities of 100l/min to 2,000l/min
2. High-performance filter
   Delivers high collection performance (99% or higher) thanks to cooling and filtering.
3. Ease of operation
   Even column replacement is very easy.
4. Air-tightness test
   Air-tightness of joints can be tested.
5. Custom specifications
   Unit dimensions and interlock mechanisms can be designed per customer specifications.

Specifications

• Gas flow
  100l/min-2,000l/min (differs by model)
• Solids include aluminum chloride.

Replacement

Collected solids are handled by UBE as industrial waste.

Filter Structure

System Configuration (200l/min type)

Warranty Period

The warranty period is one year.

System Dimensions

Utility